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Properties and coating rates of diamond-like carbon films produced by RF glow discharge of hydrocarbon gases
- Andersson, LP (author)
-
- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Norström, H (author)
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- Olaison, R (author)
- Towta, S (author)
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- (creator_code:org_t)
- 1979
- 1979
- English.
- In: Thin Solid Films. - 0040-6090 .- 1879-2731. ; 58, s. 117-
- Journal article (peer-reviewed)
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- art (subject category)
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- Andersson, LP
- Berg, Sören
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- Towta, S
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