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Substrate sputtering during plasma-deposition of diamond-like carbon films
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- Norström, H (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Olaison, R (author)
- Andersson, LP (author)
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- Berg, Sören (author)
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- (creator_code:org_t)
- 1979
- 1979
- English.
- Conference paper (peer-reviewed)
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- ref (subject category)
- kon (subject category)
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