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A comparison of A1/si diffusion barriers based on TiN or ZrN
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- Östling, M (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Norström, H (author)
- Blom, Hans-Olof (author)
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- Nygren, S (author)
- Wiklund, P (author)
- Buchta, R (author)
- Petersson, CS (author)
- Runovic, F (author)
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- (creator_code:org_t)
- 1984
- 1984
- English.
- Conference paper (peer-reviewed)
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Publication and Content Type
- ref (subject category)
- kon (subject category)
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- Östling, M
- Norström, H
- Blom, Hans-Olof
- Nygren, S
- Wiklund, P
- Buchta, R
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- Petersson, CS
- Runovic, F
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- By the university
- Uppsala University
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