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Electrical properties and thermal stability of Si/ti/TiB1/A1 contacts applied to microelectronic fabrication
- Larsson, T (author)
- Wennström, U (author)
- Norström, H (author)
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- Blom, Hans-Olof (author)
- Engström, I (author)
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- (creator_code:org_t)
- 1988
- 1988
- English.
- Conference paper (peer-reviewed)
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- kon (subject category)
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- Larsson, T
- Wennström, U
- Norström, H
- Blom, Hans-Olof
- Berg, Sören
- Engström, I
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- Uppsala University
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