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Studies of sputtering of monoatomic overlayers applied to ion assited thin film processing
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- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Nender, C (author)
- Masszi, Ferenc (author)
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- Tvarozek, V (author)
- Biersack, JP (author)
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- (creator_code:org_t)
- 1979
- 1979
- English.
- Conference paper (peer-reviewed)
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- kon (subject category)
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- Berg, Sören
- Nender, C
- Masszi, Ferenc
- Tvarozek, V
- Biersack, JP
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- Uppsala University
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