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Micromachining of silicon for thermal and position-sensitive nuclear detector applications

Bäcklund, Ylva (author)
Uppsala universitet,Fasta tillståndets elektronik
Coron, NJ (author)
Delsing, P (author)
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Jonsson, B (author)
Lindroos, M (author)
Nyman, G (author)
Ravn, H (author)
Riisager, K (author)
Stroke, HH (author)
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 (creator_code:org_t)
1989
1989
English.
In: Nuclear Instruments and Methods in Physics Research Section A. - 0168-9002 .- 1872-9576. ; 279, s. 555-559
  • Journal article (peer-reviewed)
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