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Modeling of multicomponent reactive sputtering
- Moradi, M (author)
- Nender, C (author)
-
- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
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- Blom, Hans-Olof (author)
- Belkind, A (author)
- Orban, Z (author)
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- (creator_code:org_t)
- 1991
- 1991
- English.
- In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - 0734-2101 .- 1520-8559.
- Journal article (peer-reviewed)
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- ref (subject category)
- art (subject category)
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- Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films (Search for host publication in LIBRIS)
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- Moradi, M
- Nender, C
- Berg, Sören
- Blom, Hans-Olof
- Belkind, A
- Orban, Z
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- Uppsala University
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