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- Ljungberg, Karin (author)
The effects of HF-cleaning prior to silicon wafer bonding
- Article/chapterEnglish1993
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- 1993
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- LIBRIS-ID:oai:DiVA.org:uu-258476
- https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-258476URI
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- Language:English
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- Bäcklund, YlvaUppsala universitet,Fasta tillståndets elektronik (author)
- Söderbärg, Anders (author)
- Bergh, Mats (author)
- Andersson, Mats O (author)
- Uppsala universitetFasta tillståndets elektronik (creator_code:org_t)
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