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Quasi-buckling of micromachined beams
- Lindberg, Ulf (author)
-
- Söderkvist, Jan (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Lammerink, T (author)
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- Elwenspoek, M (author)
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- (creator_code:org_t)
- 1993
- 1993
- English.
- In: Journal of Micromechanics and Microengineering. - 0960-1317 .- 1361-6439.
- Journal article (peer-reviewed)
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- art (subject category)
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- Söderkvist, Jan
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