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- Barklund, AM (author)
Ion-assisted selective deposition of aluminium for via-hole interconnections
- Article/chapterEnglish1993
Publisher, publication year, extent ...
- 1993
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:uu-258510
- https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-258510URI
Supplementary language notes
- Language:English
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- SwePubSwePub
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Added entries (persons, corporate bodies, meetings, titles ...)
- Berg, SörenUppsala universitet,Fasta tillståndets elektronik (author)
- Katardjiev, IV (author)
- Nender, C (author)
- Carlsson, P (author)
- Uppsala universitetFasta tillståndets elektronik (creator_code:org_t)
Related titles
- In:Vacuum44:3-4, s. 197-2010042-207X1879-2715
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