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Patterning of silicon wafers using the plasma jet dry etching technique
- Barklund, AM (author)
- Blom, Hans-Olof (author)
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- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
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- Bardos, L (author)
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- (creator_code:org_t)
- 1990
- 1990
- English.
- In: Vacuum. - 0042-207X .- 1879-2715. ; 41:4
- Journal article (peer-reviewed)
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- art (subject category)
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- Barklund, AM
- Blom, Hans-Olof
- Berg, Sören
- Bardos, L
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- Uppsala University
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