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Two-dimensional etching diagrams for z-cut quartz
-
- Hedlund, Christer, 1964- (author)
- Uppsala Universitet
- Bucht, U (author)
-
- Söderkvist, J (author)
- Uppsala universitet,Fasta tillståndets elektronik,Uppsala universitet, Fasta tillståndets elektronik
- (creator_code:org_t)
- 1992
- 1992
- English.
- In: Journal of Micromechanics and Microengineering. - 0960-1317 .- 1361-6439. ; 2, s. 215-217
- Journal article (peer-reviewed)
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- ref (subject category)
- art (subject category)
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- Mid Sweden University
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