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FIB lithography - nanostructuring using FIB,
-
- Jafri, S.H. M (author)
- Uppsala universitet,Tillämpad materialvetenskap,Electron Microscopy and Nanoenginnering
- (creator_code:org_t)
- 2015
- 2015
- English.
- Conference paper (peer-reviewed)
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
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- ref (subject category)
- kon (subject category)
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