The strength of surface micromachined indium phosphide devices evaluated by Weibull analysis of tensile and bending tests

• The strength of beams surface micromachined from InP was evaluated by subjecting the beams to bending and tensile tests. The tests were performed with a testing unit mounted on a micromanipulator adapted for an SEM to facilitate in situ testing. The tests

Keyword

tensile strength; bending strength; indium phosphide; Weibull statistics; reactive ion etch

Publication and Content Type

vet (subject category)

art (subject category)