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High-rate dual-target DC magnetron sputter deposition of "blue" electrochromic Mo oxide films
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- Kharrazi, M (author)
- Uppsala universitet,Institutionen för materialvetenskap
- Kullman, L (author)
- Granqvist, CG (author)
- (creator_code:org_t)
- ELSEVIER SCIENCE BV, 1998
- 1998
- English.
- In: SOLAR ENERGY MATERIALS AND SOLAR CELLS. - : ELSEVIER SCIENCE BV. - 0927-0248. ; 53:3-4, s. 349-356
- Journal article (peer-reviewed)
Abstract
Subject headings
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- Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this "blue" Mo oxide was as high as 1.5 nm/s, to be compared to similar to 0.8
Keyword
- electrochromism; thin films; sputter deposition; molybdenum oxide; smart windows; OPTICAL-PROPERTIES; MOLYBDENUM OXIDE; TUNGSTEN-OXIDE; THIN-FILMS; NITRIDE; COATINGS; AL
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- ref (subject category)
- art (subject category)
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