Fabrication of Suspended All-Metal Sensor Elements in Ceramic Laminates

Sturesson, Peter,1981-Uppsala universitet,Ångström Space Technology Centre (ÅSTC),Försvarshögskolan/Swedish National Defence College (author)

To target a wide range of high-temperature applications [1-4], the Ångström Space Technology Centre has added High-Temperature Co-fired Ceramics, HTTC, technology to its repertoire. Usually, this technology follows a processing scheme where thin sheets of green-body ceramics are metallized through screen printing and structured by embossing, punching or milling, before they are laminated and sintered to form components. A limitation with this, is the difficulty of realizing freely suspended metal structures, which is a disadvantage in, e.g., the fabrication of calorimetric sensors or electric field probes. In this work, the embedding of platinum wires in HTCC is explored experimentally, and demonstrated for use in pressure and plasma I-V sensing.

Berglund, MartinUppsala universitet,Ångström Space Technology Centre (ÅSTC)(Swepub:uu)marbe233 (author)
Söderberg, JohanUppsala universitet,Ångström Space Technology Centre (ÅSTC) (author)
Klintberg, LenaUppsala universitet,Ångström Space Technology Centre (ÅSTC)(Swepub:uu)lkl28025 (author)
Persson, AndersUppsala universitet,Ångström Space Technology Centre (ÅSTC)(Swepub:uu)andpe782 (author)
Thornell, GregerUppsala universitet,Ångström Space Technology Centre (ÅSTC)(Swepub:uu)gth12095 (author)
Uppsala universitetÅngström Space Technology Centre (ÅSTC) (creator_code:org_t)

By the author/editor: Sturesson, Peter ...; Berglund, Martin; Söderberg, Johan; Klintberg, Lena; Persson, Anders; Thornell, Greger

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