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Influence of annealing temperature on theperformance and stability of on-chip hydrothermally grown ZnO nanorod gassensor toward NO2

Jiao, Mingzhi (author)
Uppsala universitet,Mikrosystemteknik
Nguyen Viet, Chien (author)
Hanoi University of Science and Technology,ITIMS
Duy, Nguyen Van (author)
Hanoi University of Science and Technology,ITIMS
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Nguyen Duc, Hoa (author)
Hanoi University of Science and Technology,ITIMS
Hieu, Nguyen Van (author)
Hanoi University of Science and Technology,ITIMS
Hjort, Klas, 1964- (author)
Uppsala universitet,Mikrosystemteknik
Nguyen, Hugo, 1955- (author)
Uppsala universitet,Mikrosystemteknik
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 (creator_code:org_t)
2018
2018
English.
In: Academia Journal of Scientific Research. - 2315-7712. ; 6:5, s. 180-189
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • Nanorod-based gas sensors synthesized at low temperature should generally be stabilized by anneling before usage. However, the influence of annealing on the sensing performance and stability of these nanorods is rarely reported. In this study, we first fabricated gas sensors based on ZnO nanorods grown on-chip on glass substrate using hydrothermal method. Subsequently, these sensors were annealed at either 400 °C, 500 °C, or 600 °C in air for 4 h. The gas-sensing performance of the ZnO nanorods toward NO2 was tested before and after annealing. The sensitivity of the gas sensors to NO2 decreased, but the stability increased with the increase in annealing temperature. Photoluminescence spectroscopy and X-ray diffraction were used to investigate the material structure of ZnO nanorods. Results revealed that the oxygen-atom-related defects in the ZnO lattice in the region close to the surface influenced by annealing process were the most significant factors on the sensing properties and stability of ZnO nanorods.

Subject headings

NATURVETENSKAP  -- Annan naturvetenskap (hsv//swe)
NATURAL SCIENCES  -- Other Natural Sciences (hsv//eng)

Keyword

Annealing
defects in nanorods
gas sensor
hydrothermal
zinc oxide.
Teknisk fysik med inriktning mot mikrosystemteknik
Engineering Science with specialization in Microsystems Technology

Publication and Content Type

ref (subject category)
art (subject category)

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