Search: onr:"swepub:oai:DiVA.org:uu-40425" >
Selective SiOs to S...
Selective SiOs to Si3N4 etching in inductively coupled fluorocarbon plasmas
-
Schaepkens, M (author)
-
Standaert, T E F M (author)
-
Reuger, N R (author)
-
show more...
-
Oehrlein, G S (author)
-
- Hedlund, Christer, 1964- (author)
- Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap
-
- Blom, Hans-Olof (author)
- Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap
-
Cook, J M (author)
-
show less...
-
(creator_code:org_t)
- 1998
- 1998
- English.
-
In: The 25th national symposium UNY-VAC, Albany NY.
- Related links:
-
https://urn.kb.se/re...
-
show more...
-
https://urn.kb.se/re...
-
show less...
Subject headings
Close
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Electronics
- Elektronik
Publication and Content Type
- ref (subject category)
- kon (subject category)
To the university's database