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Crystalline defects in InP-to-silicon direct wafer bonding
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- Pasquariello, D (author)
- Uppsala universitet,Institutionen för materialvetenskap,MATERIALS SCIENCE/MST
- Camacho, M (author)
- Ericson, F (author)
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- Hjort, K (author)
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- (creator_code:org_t)
- 2001
- 2001
- English.
- In: Jap. J. Appl. Phys.. ; 40, s. 4837-4844
- Journal article (peer-reviewed)
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