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- Bardos, LadislavUppsala universitet,Elektricitetslära,The Plasma Group (author)
Radio frequency powered spiral hollow cathodes
- Article/chapterEnglish2020
Publisher, publication year, extent ...
- PERGAMON-ELSEVIER SCIENCE LTD,2020
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:uu-410886
- https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-410886URI
- https://doi.org/10.1016/j.vacuum.2020.109241DOI
Supplementary language notes
- Language:English
- Summary in:English
Part of subdatabase
- SwePubSwePub
Classification
Notes
- Potential usage of the radio frequency (RF) spiral hollow electrodes in comparison with the compact hollow cathodes was examined for coating and other surface processing treatments. Most properties were found similar to the compact RF hollow cathodes. The non-conventional shapes of spiral hollow cathodes can be suitable for the inner coating in narrow tubes and pipes. Small diameter spiral cathodes can generate focused high-density ion flux capable of rapid etching of the substrate.
Subject headings and genre
- NATURVETENSKAP Fysik Den kondenserade materiens fysik hsv//swe
- NATURAL SCIENCES Physical Sciences Condensed Matter Physics hsv//eng
- TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
- ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
- Hollow cathode
- Spiral hollow cathode
- Radio frequency power
- Coating
- Ion etching
- Atmospheric plasma
Added entries (persons, corporate bodies, meetings, titles ...)
- Barankova, HanaUppsala universitet,Elektricitetslära,The Plasma Group(Swepub:uu)hanabara (author)
- Uppsala universitetElektricitetslära (creator_code:org_t)
Related titles
- In:Vacuum: PERGAMON-ELSEVIER SCIENCE LTD1750042-207X1879-2715
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