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Nanoparticle Localization on Solid-State Nanopores Via Electrophoretic Force

Li, Shiyu (author)
Uppsala universitet,Fasta tillståndets elektronik
Zeng, Shuangshuang (author)
Uppsala universitet,Fasta tillståndets elektronik
Zhang, Zhen, 1979- (author)
Uppsala universitet,Fasta tillståndets elektronik
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Hjort, Klas, 1964- (author)
Uppsala universitet,Mikrosystemteknik
Zhang, Shi-Li (author)
Uppsala universitet,Fasta tillståndets elektronik
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 (creator_code:org_t)
IEEE, 2019
2019
English.
In: 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). - : IEEE. - 9781728120072 ; , s. 2372-2375
  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • This work presents a versatile and facile method for precise localization of nanoparticles on solid-state nanopores surface-functionalized with carbon via electron beam induced deposition (EBID). For the first time, EBID of carbon is demonstrated to enable nanoparticle localization on solid-state nanopores. To avoid non-specific adsorption of nanoparticles on the surface, an atomic layer deposited Al2O3 layer in combination with phosphonate passivation is used. By tuning the electron dose in the EBID process, the loading fraction of nanoparticles on carbon nanoarrays can be varied on similarly sized domains. Nanoparticle loading driven by electrophoresis can achieve an efficiency that is orders of magnitude higher than that driven by diffusion.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

Solid-state nanopore
electron beam induced deposition (EBID)
electrophoresis
nanoparticle localization
carbon nanoarrays

Publication and Content Type

ref (subject category)
kon (subject category)

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Li, Shiyu
Zeng, Shuangshua ...
Zhang, Zhen, 197 ...
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Zhang, Shi-Li
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