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Correlation between fracture characteristics and valence electron concentration of sputtered Hf-C-N based thin films

Glechner, T. (author)
TU Wien, Christian Doppler Lab Surface Engn High Performan, Vienna, Austria.
Lang, S. (author)
TU Wien, Christian Doppler Lab Surface Engn High Performan, Vienna, Austria.
Hahn, R. (author)
TU Wien, Christian Doppler Lab Surface Engn High Performan, Vienna, Austria.
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Alfreider, M. (author)
Univ Leoben, Dept Mat Sci, Leoben, Austria.
Moraes, V (author)
TU Wien, Inst Mat Sci & Technol, A-1060 Vienna, Austria.
Primetzhofer, Daniel (author)
Uppsala universitet,Tillämpad kärnfysik
Ramm, J. (author)
Oerlikon Surface Solut AG, Oerlikon Balzers, FL-9496 Balzers, Liechtenstein.
Kolozsvari, S. (author)
Plansee Composite Mat GmbH, D-86983 Lechbruck, Germany.
Kiener, D. (author)
Univ Leoben, Dept Mat Sci, Leoben, Austria.
Riedl, H. (author)
TU Wien, Christian Doppler Lab Surface Engn High Performan, Vienna, Austria.;TU Wien, Inst Mat Sci & Technol, A-1060 Vienna, Austria.
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TU Wien, Christian Doppler Lab Surface Engn High Performan, Vienna, Austria Univ Leoben, Dept Mat Sci, Leoben, Austria. (creator_code:org_t)
Elsevier BV, 2020
2020
English.
In: Surface & Coatings Technology. - : Elsevier BV. - 0257-8972 .- 1879-3347. ; 399
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • Hard protective coating materials based on transition metal nitrides and carbides typically suffer from limited fracture tolerance. To further tune these properties non-metal alloying - substituting C with N - has been proven favorable for magnetron sputtered Hf-C-N based thin films. A theoretically predicted increase in valence electron concentration (from 8.0 to 9.0 e/f.u. from Hf-C to Hf-N) through nitrogen alloying lead to an increase in fracture toughness (K-IC obtained during in-situ SEM cantilever bending) from 1.89 +/- 0.15 to 2.33 +/- 0.18 MPa.m(1/2) for Hf0.43C0.57 to Hf0.35C0.30N0.35, respectively. The hardness remains close to the super-hard regime with values of 37.8 +/- 2.1 to 39.9 +/- 2.7 GPa for these specific compositions. Already the addition of small amounts of nitrogen, while sputtering a ceramic Hf-C target, leads to a drastic increase of nitrogen on the non-metallic sublattice for fcc single phased structured HfC1-xNx films, where x = N/(C + N). The here obtained results also provide experimental proof for the correlation between fracture characteristics and valence electron concentration.

Subject headings

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Keyword

Hf-C-N
Fracture resistance
Non-metal alloying
Valence electron concentration
Thermal stability

Publication and Content Type

ref (subject category)
art (subject category)

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