Single Charge Detection in Liquid Sample Using Sub-10 nm Silicon Nanowire Transistors

• Direct detection of a single charge in liquid sample is the ultimate sensitivity goal of electrical biochemical sensors. In this paper, the events of capturing and emitting a single hydrogen ion (H+) at the solid/liquid interface were directly detected for the first time using sub-10 nm gate-oxide free silicon nanowire field-effect transistors (SiNWFETs). The SiNWFETs were fabricated using CMOS-compatible process. The intrinsic device noise was minimized with a surface reassembling process. Individually activated surface Si dangling bond (DB) acted as single H+ receptor. Discrete current signals generated by single H+-DB interactions via local Coulomb scattering were detected by the SiNWFETs. The kinetics of the single H+-DB interactions was systematically investigated. Our devices demonstrate the unprecedented ability to investigate the physics of solid/liquid interface at single charge level.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

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