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Cross-sectional tra...
Cross-sectional transmission electron microscopy study of the influence of niobium on the formation of titanium silicide in small-feature contacts
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- Jarmar, Tobias (author)
- Uppsala universitet,Institutionen för teknikvetenskaper,Materialvetenskap
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Seger, J (author)
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- Ericson, Fredric (author)
- Uppsala universitet,Institutionen för teknikvetenskaper,Materialvetenskap
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- Smith, Ulf (author)
- Uppsala universitet,Institutionen för teknikvetenskaper,Materialvetenskap
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Zhang, S.-L. (author)
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(creator_code:org_t)
- 2003
- 2003
- English.
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In: Journal of Applied Physics. ; 93:8, s. 4480-4484
- Related links:
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Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
Keyword
- Materials science
- Teknisk materialvetenskap
Publication and Content Type
- ref (subject category)
- art (subject category)
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