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Non-reactive HiPIMS...
Non-reactive HiPIMS deposition of NbCx thin films : Effect of the target power density on structure-mechanical properties
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- Bahr, A. (author)
- TU Wien, Christian Doppler Lab Surface Engn High performanc, Vienna, Austria.
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- Glechner, T. (author)
- TU Wien, Christian Doppler Lab Surface Engn High performanc, Vienna, Austria.
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- Wojcik, T. (author)
- TU Wien, Christian Doppler Lab Surface Engn High performanc, Vienna, Austria.
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- Kirnbauer, A. (author)
- TU Wien, Inst Mat Sci & Technol, Vienna, Austria.
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- Sauer, M. (author)
- TU Wien, Analyt Instrumentat Ctr, Vienna, Austria.
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- Foelske, A. (author)
- TU Wien, Analyt Instrumentat Ctr, Vienna, Austria.
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- Hunold, O. (author)
- Oerlikon Balzers, Oerlikon Surface Solut AG, Balzers, Liechtenstein.
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- Ramm, J. (author)
- Oerlikon Balzers, Oerlikon Surface Solut AG, Balzers, Liechtenstein.
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- Kolozsvari, S. (author)
- Plansee Composite Mat GmbH, Lechbruck, Germany.
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- Ntemou, Eleni (author)
- Uppsala universitet,Tillämpad kärnfysik
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- Pitthan, Eduardo (author)
- Uppsala universitet,Tillämpad kärnfysik
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- Primetzhofer, Daniel (author)
- Uppsala universitet,Tillämpad kärnfysik
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- Riedl, H. (author)
- TU Wien, Christian Doppler Lab Surface Engn High performanc, Vienna, Austria.;TU Wien, Inst Mat Sci & Technol, Vienna, Austria.
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- Hahn, R. (author)
- TU Wien, Christian Doppler Lab Surface Engn High performanc, Vienna, Austria.
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TU Wien, Christian Doppler Lab Surface Engn High performanc, Vienna, Austria TU Wien, Inst Mat Sci & Technol, Vienna, Austria. (creator_code:org_t)
- Elsevier, 2022
- 2022
- English.
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In: Surface & Coatings Technology. - : Elsevier. - 0257-8972 .- 1879-3347. ; 444
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Abstract
Subject headings
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- The exceptional mechanical properties of transition metal carbide coatings are known to be governed by the carbon content and its morphological distribution. Here, we verify the influence of the target peak power density on the chemical composition, microstructure, and mechanical properties of NbCx coatings grown by non-reactive high-power impulse magnetron sputtering (HiPIMS). By tuning the pulse parameters, the power density can be increased from 0.11 to 1.48 kW/cm2 leading to a decrease in the C/Nb ratio from 1.52 to 0.99 within the films - proven by combined elastic backscattering and time-of-flight elastic recoil detection analysis. This decrease in the C/Nb ratio is accompanied by microstructural changes from nanocomposite morphologies with an average grain size of 6.6 +/- 2.5 nm at 0.13 kW/cm2 into more columnar structures with an average column width of 65.2 +/- 18.7 nm at 1.48 kW/cm2. Independent from the C/Nb ratio, all films exhibit a single face-centered cubic structure. The mechanical properties correlate with the enhanced growth behavior dominated by ions at higher peak power densities and the varied C/Nb ratios. A maximum in hardness and fracture toughness of H = 38.7 +/- 3.6 GPa and KIc = 2.78 +/- 0.13 MPa center dot m1/2 (at 3.2 GPa residual compressive stress), is obtained for the nearly stoichiometric NbC coating exhibiting C/Nb ratio of 1.06.
Subject headings
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Bearbetnings-, yt- och fogningsteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Manufacturing, Surface and Joining Technology (hsv//eng)
Keyword
- NbC
- HiPIMS
- Thin films
- Nanocomposite
- Fracture toughness
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Bahr, A.
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Glechner, T.
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Wojcik, T.
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Kirnbauer, A.
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Sauer, M.
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Foelske, A.
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Hunold, O.
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Ramm, J.
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Kolozsvari, S.
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Ntemou, Eleni
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Pitthan, Eduardo
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Primetzhofer, Da ...
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Riedl, H.
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Hahn, R.
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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and Materials Chemis ...
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Materials Engine ...
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and Manufacturing Su ...
- Articles in the publication
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Surface & Coatin ...
- By the university
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Uppsala University