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Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering

Gangaprasad Rao, Smita (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden
Illgner, Pascal Manuel (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden
Boyd, Robert (author)
Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Plasma and Coatings Physics Division, Linköping University 2 , Linköping 58183, Sweden
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Nagy, Gyula (author)
Uppsala universitet,Tillämpad kärnfysik,Uppsala Univ, Sweden,Department of Physics and Astronomy, Uppsala University 3 , Lägerhyddsvägen 1, Uppsala S-75120, Sweden
Djemia, Philippe (author)
Univ Sorbonne Paris Nord, Alliance Sorbonne Paris Cite, Lab Sci Procedes & Mat, UPR CNRS 3407, F-93430 Villetaneuse, France.,Université Sorbonne Paris Nord, Alliance Sorbonne Paris Cité, Laboratoire des Sciences des Procédés et des Matériaux 4 , UPR 3407 CNRS, Villetaneuse F-93430, France
Primetzhofer, Daniel (author)
Uppsala universitet,Tillämpad kärnfysik,Uppsala Univ, Sweden,Department of Physics and Astronomy, Uppsala University 3 , Lägerhyddsvägen 1, Uppsala S-75120, Sweden
Petrov, Ivan (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Univ Illinois, IL 61801 USA,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden;Materials Research Laboratory and Department of Materials Science, University of Illinois 5 , Urbana, Illinois 61801
Le Febvrier, Arnaud (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden
Eklund, Per (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden
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 (creator_code:org_t)
American Institute of Physics (AIP), 2023
2023
English.
In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 41:5
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  • Journal article (peer-reviewed)
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  • Low-temperature epitaxial growth of multicomponent alloy-based thin films remains an outstanding challenge in materials science and is important for established fundamental properties of these complex materials. Here, Cantor nitride (CrMnFeCoNi)N thin films were epitaxially grown on MgO(100) substrates at low deposition temperature by magnetic-field-assisted dc-magnetron sputtering, a technique where a magnetic field is applied to steer the dense plasma to the substrate thereby influencing the flux of Ar-ions bombarding the film during growth. Without ion bombardment, the film displayed textured growth. As the ion flux was increased, the films exhibited epitaxial growth. The epitaxial relationship between film and substrate was found to be cube on cube (001)film parallel to(001)MgO, [100]film parallel to[100]MgO. The epitaxy was retained up to a thickness of approximately similar to 100 nm after which the growth becomes textured with a 002 out-of-plane orientation. The elastic constants determined by Brillouin inelastic light scattering were found to be C-11 = 320 GPa, C-12 = 125 GPa, and C-44 = 66 GPa, from which the polycrystalline Young's modulus was calculated as 204 GPa and Poisson's ratio = 0.32, whereas available elastic properties still remained very scarce.

Subject headings

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
NATURVETENSKAP  -- Kemi -- Oorganisk kemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Nanoteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Nano-technology (hsv//eng)
NATURVETENSKAP  -- Kemi -- Materialkemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences -- Materials Chemistry (hsv//eng)

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