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Low temperature epi...
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Gangaprasad Rao, SmitaLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
- Artikel/kapitelEngelska2023
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American Institute of Physics (AIP),2023
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LIBRIS-ID:oai:DiVA.org:uu-511889
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https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-511889URI
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https://doi.org/10.1116/6.0002947DOI
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-197862URI
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Språk:engelska
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Sammanfattning på:engelska
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Funding Agencies|VINNOVA Competence Centre FunMat-II; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkouml;ping University; Knut and Alice Wallenberg foundation through the Wallenberg Academy Fellows program; Swedish Research Council (VR); Swedish Research Council VR-RFI; [2016-05156]; [2009 00971]; [KAW-2020.0196]; [2021-03826]; [2019_00191]
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Low-temperature epitaxial growth of multicomponent alloy-based thin films remains an outstanding challenge in materials science and is important for established fundamental properties of these complex materials. Here, Cantor nitride (CrMnFeCoNi)N thin films were epitaxially grown on MgO(100) substrates at low deposition temperature by magnetic-field-assisted dc-magnetron sputtering, a technique where a magnetic field is applied to steer the dense plasma to the substrate thereby influencing the flux of Ar-ions bombarding the film during growth. Without ion bombardment, the film displayed textured growth. As the ion flux was increased, the films exhibited epitaxial growth. The epitaxial relationship between film and substrate was found to be cube on cube (001)film parallel to(001)MgO, [100]film parallel to[100]MgO. The epitaxy was retained up to a thickness of approximately similar to 100 nm after which the growth becomes textured with a 002 out-of-plane orientation. The elastic constants determined by Brillouin inelastic light scattering were found to be C-11 = 320 GPa, C-12 = 125 GPa, and C-44 = 66 GPa, from which the polycrystalline Young's modulus was calculated as 204 GPa and Poisson's ratio = 0.32, whereas available elastic properties still remained very scarce.
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Biuppslag (personer, institutioner, konferenser, titlar ...)
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Illgner, Pascal ManuelLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten(Swepub:liu)pasil50
(författare)
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Boyd, RobertLinköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten(Swepub:liu)robbo87
(författare)
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Nagy, GyulaUppsala universitet,Tillämpad kärnfysik,Uppsala Univ, Sweden(Swepub:uu)gyuna995
(författare)
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Djemia, PhilippeUniv Sorbonne Paris Nord, Alliance Sorbonne Paris Cite, Lab Sci Procedes & Mat, UPR CNRS 3407, F-93430 Villetaneuse, France.
(författare)
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Primetzhofer, DanielUppsala universitet,Tillämpad kärnfysik,Uppsala Univ, Sweden(Swepub:uu)danpr521
(författare)
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Petrov, IvanLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Univ Illinois, IL 61801 USA(Swepub:liu)ivape26
(författare)
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Le Febvrier, ArnaudLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten(Swepub:liu)arnle40
(författare)
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Eklund, PerLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten(Swepub:liu)perek02
(författare)
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Linköpings universitetTunnfilmsfysik
(creator_code:org_t)
Sammanhörande titlar
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Ingår i:Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films: American Institute of Physics (AIP)41:50734-21011520-8559
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