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Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films
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- Ma, YJ (author)
- Uppsala universitet
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- Yang, HN (author)
- Uppsala universitet
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- Guo, J (author)
- Uppsala universitet
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- AMER INST PHYSICS, 1998
- 1998
- English.
- In: APPLIED PHYSICS LETTERS. - : AMER INST PHYSICS. - 0003-6951. ; 72:25, s. 3353-3355
- Journal article (other academic/artistic)
Abstract
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- Fluorinated amorphous carbon (a-CFx) films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition.
Keyword
- DIAMOND
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- vet (subject category)
- art (subject category)
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