Search: onr:"swepub:oai:DiVA.org:uu-75930" >
Modelling of the Pl...
Modelling of the Plasma Impedance in Reactive Magnetron Sputtering for Various Traget Materials
-
Pflug, Andreas (author)
-
Siemers, M (author)
-
Szyszka, B (author)
-
show more...
-
- Kappertz, Oliver (author)
- Uppsala universitet,Institutionen för teknikvetenskaper,Elektronik,Fasta tillståndets elektronik
-
- Nyberg, Tomas (author)
- Uppsala universitet,Institutionen för teknikvetenskaper,Elektronik,Fasta tillståndets elektronik
-
- Berg, Sören (author)
- Uppsala universitet,Institutionen för teknikvetenskaper,Elektronik,Fasta tillståndets elektronik
-
Severin, Daniel (author)
-
Wuttig, M (author)
-
show less...
-
(creator_code:org_t)
- 2005
- 2005
- English.
-
In: Proceedings of the 48th Annual Society of Vacuum Coaters Technical Conference in Denver, April 23-28. ; , s. 298-301
- Related links:
-
https://urn.kb.se/re...
To the university's database