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Modelling of the Plasma Impedance in Reactive Magnetron Sputtering for Various Traget Materials
- Pflug, Andreas (author)
- Siemers, M (author)
- Szyszka, B (author)
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- Severin, Daniel (author)
- Wuttig, M (author)
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- (creator_code:org_t)
- 2005
- 2005
- English.
- In: Proceedings of the 48th Annual Society of Vacuum Coaters Technical Conference in Denver, April 23-28. ; , s. 298-301
- Conference paper (other academic/artistic)
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- kon (subject category)
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- Pflug, Andreas
- Siemers, M
- Szyszka, B
- Kappertz, Oliver
- Nyberg, Tomas
- Berg, Sören
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- Severin, Daniel
- Wuttig, M
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- Uppsala University
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