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Laser assisted chemical vapour deposition of hydrogen containing amorphous carbon at room temperature

Stenberg, G (author)
Uppsala universitet
Piglmayer, K (author)
Uppsala universitet
Boman, M (author)
Uppsala universitet
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Carlsson, JO (author)
Uppsala universitet
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 (creator_code:org_t)
ELSEVIER SCIENCE BV, 1997
English 549-553 s.
In: APPLIED SURFACE SCIENCE. - : ELSEVIER SCIENCE BV. ; 110
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  • Hydrogen containing amorphous carbon films were deposited by photolytic decomposition of methylene iodide, CH2I2, at room temperature. An excimer laser operated at 193 nm was used as the excitation source. Smooth and adherent films were produced on Si(10

Keyword

PHOTOINDUCED DISSOCIATION; SURFACE; CH2I2

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Stenberg, G
Piglmayer, K
Boman, M
Carlsson, JO
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Uppsala University

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