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Laser assisted chem...
Laser assisted chemical vapour deposition of hydrogen containing amorphous carbon at room temperature
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- Stenberg, G (author)
- Uppsala universitet
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- Piglmayer, K (author)
- Uppsala universitet
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- Boman, M (author)
- Uppsala universitet
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- Carlsson, JO (author)
- Uppsala universitet
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(creator_code:org_t)
- ELSEVIER SCIENCE BV, 1997
- English 549-553 s.
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In: APPLIED SURFACE SCIENCE. - : ELSEVIER SCIENCE BV. ; 110
- Related links:
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https://urn.kb.se/re...
Abstract
Subject headings
Close
- Hydrogen containing amorphous carbon films were deposited by photolytic decomposition of methylene iodide, CH2I2, at room temperature. An excimer laser operated at 193 nm was used as the excitation source. Smooth and adherent films were produced on Si(10
Keyword
- PHOTOINDUCED DISSOCIATION; SURFACE; CH2I2
Publication and Content Type
- vet (subject category)
- ovr (subject category)
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