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Compositional varia...
Compositional variations of sputter deposited Ti/W barrier layers on substrates with pronounced surface topography
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- Jonsson, Lars (author)
- Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap
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- Hedlund, Christer, 1964- (author)
- Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap
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- Katardjiev, Ilia (author)
- Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap
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- Berg, Sören (author)
- Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap
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(creator_code:org_t)
- 1999
- 1999
- English.
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In: THIN SOLID FILMS. - 0040-6090 .- 1879-2731. ; 348:1-2, s. 227-232
- Related links:
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https://urn.kb.se/re...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
Close
- Sputter deposited Ti/W barrier layers have been found to be Ti deficient with respect to the target composition, which is attributed to the preferential resputtering of Ti from the deposited films by energetic neutrals or ions from the discharge. On the o
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- deposition process; titanium; tungsten; ion bombardment; YIELD AMPLIFICATION; ION-BOMBARDMENT; MICROSTRUCTURE
- Electronics
- Elektronik
Publication and Content Type
- ref (subject category)
- art (subject category)
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