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In situ scanning force microscopy study of TiN layers in sulphuric acid
-
- Herranen, Merja (author)
- Uppsala universitet,Institutionen för materialkemi,Oorganisk kemi,oorganisk kemi
-
- Nordin, M (author)
- Uppsala universitet,Institutionen för materialvetenskap,Oorganisk kemi
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- Carlsson, Jan-Otto (author)
- Uppsala universitet,Institutionen för materialkemi,Oorganisk kemi,oorganisk kemi
- (creator_code:org_t)
- 1997
- 1997
- English.
- In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. - 1071-1023. ; 15:6, s. 1865-1870
- Journal article (peer-reviewed)
Abstract
Subject headings
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- Morphological changes of sputter-deposited TiN films in 0.1 M sulphuric acid have been followed in situ with scanning force microscopy at different potentials. Disappearance of small structures was observed with increasing potential up to 1.2 V. A furthe
Subject headings
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
Keyword
- RAY PHOTOELECTRON-SPECTROSCOPY; CHEMICAL VAPOR-DEPOSITION; TITANIUM NITRIDE; FILMS; SURFACE; ELECTRODES; OXIDATION; OXIDES; XPS
- Inorganic chemistry
- Oorganisk kemi
Publication and Content Type
- ref (subject category)
- art (subject category)
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