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Characterization of...
Characterization of a particle filter made from crossed v-grooves in silicon
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LIBRIS-ID:oai:DiVA.org:uu-94646
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https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-94646URI
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Nguyen, HugoUppsala universitet,Institutionen för teknikvetenskaper
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Eriksson, Anders
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Stenmark, Lars
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Köhler, Johan
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Uppsala universitetInstitutionen för teknikvetenskaper
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In:Journal of microelectromechanical systems
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