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A metallic micropum...
A metallic micropump for high-pressure microfluidics
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- Bodén, Roger (author)
- Uppsala universitet,Mikrosystemteknik
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- Hjort, Klas (author)
- Uppsala universitet,Mikrosystemteknik
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- Schweitz, Jan-Åke (author)
- Uppsala universitet,Mikrosystemteknik
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- Simu, Urban (author)
- Uppsala universitet,Mikrosystemteknik
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(creator_code:org_t)
- 2008-09-26
- 2008
- English.
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In: Journal of Micromechanics and Microengineering. - : IOP Publishing. - 0960-1317 .- 1361-6439. ; 18:11, s. 115009-
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- This paper presents one of the strongest mechanical sub-cm(3) sized micropumps for microfluidics. It consists of two active valves and one pumping chamber, each operated by a paraffin actuator that is driven by a low-voltage square pulse waveform. The pump is fabricated in a simple process using parylene-coated stainless steel stencils, paraffin and copper clad polyimide. When driving the pump at 0.07 Hz and 2.0 V (0.8 W) per actuator, it pumped water without leakage at a flow rate of 0.75 mu L min(-1) up to above 50 bar (5 MPa) back-pressure. The frequency dependence was evaluated and a maximum flow rate of 1 mu L min(-1) at 0.21 Hz and 1.8 V was observed. A thermomechanical FEM analysis, which was in good agreement with experiments at low frequencies, predicts the behaviour at higher frequencies.
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
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