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EXAFS measurements of metal-decorated nanocavities in Si
- Azevedo, GD (author)
- Ridgway, MC (author)
- Betlehem, J (author)
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- Yu, KM (author)
- Foran, GJ (author)
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- (creator_code:org_t)
- 2003
- 2003
- English.
- In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. - 0168-583X. ; 199, s. 179-184
- Conference paper (peer-reviewed)
Abstract
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- This contribution presents a sample preparation methodology to enable the identification, with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates. Preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities are reported. (C) 2002 Elsevier Science B.V. All rights reserved.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- voids
- gettering
- silicon
- EXAFS
- cavities
Publication and Content Type
- kon (subject category)
- ref (subject category)
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- Azevedo, GD
- Ridgway, MC
- Betlehem, J
- Yu, KM
- Glover, Chris
- Foran, GJ
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- NATURAL SCIENCES
- NATURAL SCIENCES
- and Physical Science ...
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- Nuclear Instrume ...
- By the university
- Lund University
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