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  • Vavra, ISlovak Academy of Sciences (author)

Electron-beam mixing of W1 - xSix Si multilayers

  • Article/chapterEnglish1995

Publisher, publication year, extent ...

  • 1995
  • 2 s.

Numbers

  • LIBRIS-ID:oai:lup.lub.lu.se:5868c9fc-79e1-4b2d-9912-b2f986ad1025
  • https://lup.lub.lu.se/record/5868c9fc-79e1-4b2d-9912-b2f986ad1025URI
  • https://doi.org/10.1016/0042-207X(95)00107-7DOI

Supplementary language notes

  • Language:English
  • Summary in:English

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  • Subject category:art swepub-publicationtype
  • Subject category:ref swepub-contenttype

Notes

  • The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the application in nanometer-scale technology.

Subject headings and genre

Added entries (persons, corporate bodies, meetings, titles ...)

  • Wallenberg, LRLund University,Lunds universitet,Centrum för analys och syntes,Kemiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Centre for Analysis and Synthesis,Department of Chemistry,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)ook2-rwa (author)
  • Kudryashov, VAInstitute of Microelectronics and High-Purity Materials, Russian Academy of Sciences (author)
  • Slovak Academy of SciencesCentrum för analys och syntes (creator_code:org_t)

Related titles

  • In:Vacuum46:8-10, s. 1063-10640042-207X

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  • Vacuum (Search for host publication in LIBRIS)

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By the author/editor
Vavra, I
Wallenberg, LR
Kudryashov, VA
About the subject
NATURAL SCIENCES
NATURAL SCIENCES
and Physical Science ...
and Condensed Matter ...
Articles in the publication
Vacuum
By the university
Lund University

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I_Vavra
Vavra, I
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