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Enhanced sputtering...
Enhanced sputtering and incorporation of Mn in implanted GaAs and ZnO nanowires
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- Johannes, A. (author)
- Institute for Solid State Physics, Friedrich-Schiller-University Jena, Jena, Germany
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- Noack, S. (author)
- Institute for Solid State Physics, Friedrich-Schiller-University Jena, Jena, Germany
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- Paschoal, Waldomiro (author)
- Högskolan i Halmstad,Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH,Akademin för informationsteknologi,Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund, Sweden
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- Kumar, Sandeep (author)
- Högskolan i Halmstad,Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH,Akademin för informationsteknologi,Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund, Sweden
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- Jacobsson, Daniel (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH,Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund, Sweden
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- Pettersson, Håkan (author)
- Högskolan i Halmstad,Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH,Tillämpad matematik och fysik (MPE-lab),Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund, Sweden,Nanovetenskap
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- Samuelson, Lars (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH,Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund, Sweden
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- Dick Thelander, Kimberly (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Centrum för analys och syntes,Kemiska institutionen,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH,Centre for Analysis and Synthesis,Department of Chemistry,Faculty of Engineering, LTH
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- Martinez-Criado, G. (author)
- European Synchrotron Radiation Facility, Grenoble, France
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- Burghammer, M. (author)
- European Synchrotron Radiation Facility, Grenoble, France
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- Ronning, C. (author)
- Institute for Solid State Physics, Friedrich-Schiller-University Jena, Jena, Germany
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- Dick, Kimberly A. (author)
- Centre for Analysis and Synthesis, Lund University, Lund, Sweden
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(creator_code:org_t)
- 2014-09-11
- 2014
- English.
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In: Journal of Physics D: Applied Physics. - Bristol : IOP Publishing. - 1361-6463 .- 0022-3727. ; 47:39
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Abstract
Subject headings
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- We simulated and experimentally investigated the sputter yield of ZnO and GaAs nanowires, which were implanted with energetic Mn ions at room temperature. The resulting thinning of the nanowires and the dopant concentration with increasing Mn ion fluency were measured by accurate scanning electron microscopy (SEM) and nano-x-Ray Fluorescence (nanoXRF) quantification, respectively. We observed a clearly enhanced sputter yield for the irradiated nanowires compared to bulk, which is also corroborated by iradina simulations. These show a maximum if the ion range matches the nanowire diameter. As a consequence of the erosion thinning of the nanowire, the incorporation of the Mn dopants is also enhanced and increases non-linearly with increasing ion fluency.
Subject headings
- NATURVETENSKAP -- Kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- ion beam
- sputter yield
- nanowires
- x-ray fluorescence
- GaAs
- ZnO
- monte
- carlo simulation
- Ion implantation
Publication and Content Type
- art (subject category)
- ref (subject category)
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- By the author/editor
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Johannes, A.
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Noack, S.
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Paschoal, Waldom ...
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Kumar, Sandeep
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Jacobsson, Danie ...
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Pettersson, Håka ...
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show more...
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Samuelson, Lars
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Dick Thelander, ...
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Martinez-Criado, ...
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Burghammer, M.
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Ronning, C.
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Dick, Kimberly A ...
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Condensed Matter ...
- Articles in the publication
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Journal of Physi ...
- By the university
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Lund University
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Halmstad University