onr:"swepub:oai:lup.lub.lu.se:f6fbdbfd-ac3c-47af-b852-cd6cc2764798"
Search: onr:"swepub:oai:lup.lub.lu.se:f6fbdbfd-ac3c-47af-b852-cd6cc2764798" > Nanoimprint lithogr...
- 1 of 1
- Previous record
- Next record
- To hitlist
Nanoimprint lithography for fabrication of three-terminal ballistic junctions in InP/GaInAs
-
- Maximov, Ivan (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
-
- Carlberg, Patrick (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
-
- Wallin, Daniel (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
- show more...
- show less...
- (creator_code:org_t)
- 2002-09-20
- 2002
- English.
- In: Nanotechnology. - : IOP Publishing. - 0957-4484. ; 13:5, s. 666-668
- Journal article (peer-reviewed)
Abstract
Subject headings
Close
- We present processing technology and characterization results for InP/GaInAs two-dimensional electron gas (2DEG) three-terminal ballistic junction (TBJ) devices manufactured using nanoimprint lithography (NIL). To transfer sub-100 nm features into a high-mobility InP-based 2DEG material, we used SiO2/Si stamps made using electron beam lithography and reactive ion etching. After NIL, the resist residues are removed in oxygen plasma; this is followed by wet etching of InP/GaInAs to define the TBJ structures. Fabricated TBJ devices are characterized using scanning electron microscopy and electron transport measurements. Highly non-linear electrical characteristics as predicted by the theory (Xu H Q 2001 APPI. Phys. Lett. 78 2064) are demonstrated.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology -- Nano-technology (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
Find in a library
- Nanotechnology (Search for host publication in LIBRIS)
To the university's database
- 1 of 1
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Maximov, Ivan
- Carlberg, Patric ...
- Wallin, Daniel
- Shorubalko, Ivan
- Seifert, Werner
- Xu, Hongqi
- show more...
- Montelius, Lars
- Samuelson, Lars
- show less...
- About the subject
-
- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
- and Nano technology
- and Nano technology
- Articles in the publication
- Nanotechnology
- By the university
- Lund University
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
