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Ultrasensitive mass...
Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry
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Forsen, E (author)
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Abadal, G (author)
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- Ghatnekar-Nilsson, Sara (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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Teva, J (author)
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Verd, J (author)
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Sandberg, R (author)
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Svendsen, W (author)
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Perez-Murano, F (author)
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Esteve, J (author)
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Figueras, E (author)
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Campabadal, F (author)
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- Montelius, Lars (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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Barniol, N (author)
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Boisen, A (author)
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(creator_code:org_t)
- AIP Publishing, 2005
- 2005
- English.
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In: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 87:4
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Abstract
Subject headings
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- Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air. A mass sensitivity of 4 ag/Hz has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
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- By the author/editor
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Forsen, E
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Abadal, G
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Ghatnekar-Nilsso ...
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Teva, J
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Verd, J
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Sandberg, R
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show more...
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Svendsen, W
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Perez-Murano, F
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Esteve, J
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Figueras, E
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Campabadal, F
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Montelius, Lars
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Barniol, N
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Boisen, A
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Condensed Matter ...
- Articles in the publication
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Applied Physics ...
- By the university
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Lund University