onr:"swepub:oai:research.chalmers.se:006ae69d-d555-4a7c-95a8-53c76a098dc7"
Search: onr:"swepub:oai:research.chalmers.se:006ae69d-d555-4a7c-95a8-53c76a098dc7" > Navigation aids in ...
- 1 of 1
- Previous record
- Next record
- To hitlist
Navigation aids in the search for future high-k dielectrics: physical and electrical trends
-
- Engström, Olof, 1943 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Raeissi, Bahman, 1979 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
- Hall, Steve (author)
- show more...
- Buiu, Octavian (author)
- Lemme, Max (author)
- Gottlob, Heiner (author)
- Hurley, Paul (author)
- Cherkaoui, Karim (author)
- show less...
- (creator_code:org_t)
- 2006
- 2006
- English.
- In: Proceeding of 7th European Workshop on Ultimate Integration of Silicon (ULIS 2006), p.115-118, April 20-21, Grenoble, France (2006).. ; , s. 115-118
- Journal article (peer-reviewed)
Abstract
Subject headings
Close
- From experimental literature data on metal oxides combinedwith theoretical estimates, we present empirical relations for k-values and energy band offset values, that can be used in the search for gate dielectric materials fulfilling the needs of future CMOS generations. Only a few materials investigated so far have properties meeting the demands for k and energy band offset values in the development of CMOS down to 22 nm.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Dielectric Constant
- High-k Dielectric
- Physical Properties of Dielectrics
Publication and Content Type
- art (subject category)
- ref (subject category)
Find in a library
- Proceeding of 7th European Workshop on Ultimate Integration of Silicon (ULIS 200... (Search for host publication in LIBRIS)
To the university's database
- 1 of 1
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Engström, Olof, ...
- Raeissi, Bahman, ...
- Hall, Steve
- Buiu, Octavian
- Lemme, Max
- Gottlob, Heiner
- show more...
- Hurley, Paul
- Cherkaoui, Karim
- show less...
- About the subject
-
- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
- and Electrical Engin ...
- and Other Electrical ...
- Articles in the publication
- Proceeding of 7t ...
- By the university
- Chalmers University of Technology
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
