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Low-Pressure-Chemical-Vapor-Deposition SiNx Passivated AlGaN/GaN HEMTs for Power Amplifier Application

Huang, Tongde, 1985 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Axelsson, Olle, 1986 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Malmros, Anna, 1977 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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Bergsten, Johan, 1988 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Gustafsson, Sebastian, 1990 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Thorsell, Mattias, 1982 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Rorsman, Niklas, 1964 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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 (creator_code:org_t)
ISBN 9781479987672
2015
2015
English.
In: 2015 Asia-Pacific Microwave Conference (Apmc), Vols 1-3. - 9781479987672 ; 3
  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • A Low-Pressure-Chemical-Vapor-Deposition (LPCVD) bilayer SiNx passivation scheme has been investigated and developed, which effectively suppress the current collapse in AlGaN/GaN HEMTs. Low current slump is very helpful for microwave power amplifier application. Compared to in-situ SiNx passivations by metal-organic-chemical-vapor-deposition (MOCVD) and ex-situ SiNx passivations by plasma-enhanced-chemical-vapor-deposition (PECVD), the LPCVD SiNx exhibits the quickest recovery time from double-sweep IV curves. From pulsed IV and load-pull measurements, LPCVD SiNx is also confirmed to deliver superior large signal performance. The bilayer LPCVD SiNx passivated device shows negligible current slump (

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Telekommunikation (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Telecommunications (hsv//eng)

Keyword

Trapping
current collapse
AlGaN/GaN high-electron-mobility transistors
passivation

Publication and Content Type

kon (subject category)
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