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Low-Pressure-Chemic...
Low-Pressure-Chemical-Vapor-Deposition SiNx Passivated AlGaN/GaN HEMTs for Power Amplifier Application
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- Huang, Tongde, 1985 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Axelsson, Olle, 1986 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Malmros, Anna, 1977 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Bergsten, Johan, 1988 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Gustafsson, Sebastian, 1990 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Thorsell, Mattias, 1982 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Rorsman, Niklas, 1964 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- ISBN 9781479987672
- 2015
- 2015
- English.
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In: 2015 Asia-Pacific Microwave Conference (Apmc), Vols 1-3. - 9781479987672 ; 3
- Related links:
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https://research.cha...
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https://doi.org/10.1...
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Abstract
Subject headings
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- A Low-Pressure-Chemical-Vapor-Deposition (LPCVD) bilayer SiNx passivation scheme has been investigated and developed, which effectively suppress the current collapse in AlGaN/GaN HEMTs. Low current slump is very helpful for microwave power amplifier application. Compared to in-situ SiNx passivations by metal-organic-chemical-vapor-deposition (MOCVD) and ex-situ SiNx passivations by plasma-enhanced-chemical-vapor-deposition (PECVD), the LPCVD SiNx exhibits the quickest recovery time from double-sweep IV curves. From pulsed IV and load-pull measurements, LPCVD SiNx is also confirmed to deliver superior large signal performance. The bilayer LPCVD SiNx passivated device shows negligible current slump (
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Telekommunikation (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Telecommunications (hsv//eng)
Keyword
- Trapping
- current collapse
- AlGaN/GaN high-electron-mobility transistors
- passivation
Publication and Content Type
- kon (subject category)
- ref (subject category)
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Huang, Tongde, 1 ...
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Axelsson, Olle, ...
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Malmros, Anna, 1 ...
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Bergsten, Johan, ...
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Gustafsson, Seba ...
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Thorsell, Mattia ...
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show more...
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Rorsman, Niklas, ...
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- About the subject
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Electrical Engin ...
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and Telecommunicatio ...
- Articles in the publication
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2015 Asia-Pacifi ...
- By the university
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Chalmers University of Technology