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Tunable thin film b...
Tunable thin film bulk acoustic wave resonators with improved Q-factor
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- Vorobiev, Andrei, 1963 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Gevorgian, Spartak, 1948 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- AIP Publishing, 2010
- 2010
- English.
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In: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 96:21, s. Article Number: 212904 -
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Abstract
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- The tunable solidly mounted Ba0.25Sr0.75TiO3 (BSTO) thin film bulk acoustic wave resonators (TFBARs) with improved Q-factor are fabricated and characterized. The BSTO films are grown by magnetron sputtering at temperature 600 degrees C and extremely low sputter gas pressure 2 mTorr using on-axis configuration. The measured TFBARs Q-factor is more than 250 and mechanical Q-factor is more than 350 at 5 GHz resonance frequency. The improvement in the Q-factor is associated with reduction in the BSTO film grain misorientation. The latter is responsible for generation of shear waves leaking through the Bragg reflector and corresponding acoustic loss. (C) 2010 American Institute of Physics.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- baxsr1-xtio3
Publication and Content Type
- art (subject category)
- ref (subject category)
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