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Interface state properties of high-k/SiOx/Si interfaces portrayed by multiparameter admittance spectroscopy

Raeissi, Bahman, 1979 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Gutt, T (author)
Gottlob, H. D. B. (author)
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Przewlocki, H.M. (author)
Engström, Olof, 1943 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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 (creator_code:org_t)
2010
2010
English.
In: Proceedings of the 16th Workshop on Dielectrics in Microelectronics, p. 103, Bratislava, June 28 - 30 2010.
  • Conference paper (peer-reviewed)
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TEKNIK OCH TEKNOLOGIER  -- Annan teknik -- Övrig annan teknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies -- Other Engineering and Technologies not elsewhere specified (hsv//eng)

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