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- Bengtsson, Stefan,1961Chalmers tekniska högskola,Chalmers University of Technology (author)
Room temperature wafer bonding of silicon, oxidized silicon, and crystalline quartz
- Article/chapterEnglish2000
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- Springer Science and Business Media LLC,2000
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- LIBRIS-ID:oai:research.chalmers.se:174c7c1e-145c-4811-9f08-d4f9347456fd
- https://doi.org/10.1007/s11664-000-0180-7DOI
- https://research.chalmers.se/publication/17718URI
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- Language:English
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- Amirfeiz, Petra,1973Chalmers tekniska högskola,Chalmers University of Technology (author)
- Chalmers tekniska högskola (creator_code:org_t)
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- In:Journal Of Electronic Materials: Springer Science and Business Media LLC29:7, s. 909-9150361-52351543-186X
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