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Encapsulation of si...
Encapsulation of silicon resonant structures
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Corman, Thierry (author)
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Stemme, Göran, 1958 (author)
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(creator_code:org_t)
- 1998
- 1998
- English.
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In: Micro Structure Workshop 1998 (MSW’98), March 26-27, Uppsala, Sweden.
- Related links:
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https://research.cha...
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Maskinteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Mechanical Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Annan teknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Other Engineering and Technologies (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Kemiteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Chemical Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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- kon (subject category)
- ref (subject category)
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