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Preparation and electrical characterization of silicon structures formed by wafer bonding
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- Bengtsson, Stefan, 1961 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
- (creator_code:org_t)
- ISBN 917032655X
- 1991
- English.
- Doctoral thesis (other academic/artistic)
Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Si-Si interfaces
- hydrophobic surface
- electro-optical studies
- deep electron traps
Publication and Content Type
- dok (subject category)
- vet (subject category)
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