Fabrication of nanoscale electrostatic lenses

• The fabrication of cylindrical multi-element electrostatic lenses at the nanoscale presents a challenge; they are high-aspect-ratio structures that should be rotationally symmetric, well aligned and freestanding, with smooth edges and flat, clean surfaces. In this paper, we present the fabrication results of a non-conventional process, which uses a combination of focused gallium ion-beam milling and hydrofluoric acid vapor etching. This process makes it possible to fabricate nanoscale electrostatic lenses down to 140 nm in aperture diameter and 4.2 mu m in column length, with a superior control of the geometry as compared to conventional lithography-based techniques.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

NATURVETENSKAP  -- Fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences (hsv//eng)

Keyword

field

objective lens

microscope

systems

Physics

Publication and Content Type

art (subject category)

ref (subject category)