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Post-Growth Processing of Carbon Nanotubes for Interconnect Applications - A Review

Fu, Yifeng, 1984 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Mu, Wei, 1985 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Sun, Shuangxi, 1986 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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Wang, N. (author)
Shanghai University
Huang, S. (author)
Shanghai University
Liu, Johan, 1960 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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 (creator_code:org_t)
ISBN 9781509014026
2016
2016
English.
In: 2016 6th Electronic System-Integration Technology Conference (Estc). - 9781509014026 ; , s. Article no 7764713-
  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • Interconnect is one of the most important functions of packaging technology. It delivers power and signals into and out of electronic systems. The performance and reliability of microsystems are dependent on the interconnect quality. This paper reviews the chip-level interconnects based on carbon nanotubes (CNTs), this includes their applications for both on-chip and off-chip interconnects. Various post-growth processing of CNTs, such as doping, densification, transfer, metallization, etc., for the improvement of their performance will be reviewed.

Subject headings

NATURVETENSKAP  -- Data- och informationsvetenskap -- Datorteknik (hsv//swe)
NATURAL SCIENCES  -- Computer and Information Sciences -- Computer Engineering (hsv//eng)

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