onr:"swepub:oai:research.chalmers.se:5156233b-45ee-4ec0-a257-70fc8cc9214e"
Search: onr:"swepub:oai:research.chalmers.se:5156233b-45ee-4ec0-a257-70fc8cc9214e" > Optimized cleaning ...
- 1 of 1
- Previous record
- Next record
- To hitlist
- Ljungberg, Karin (author)
Optimized cleaning processes for silicon wafer bonding
- Article/chapterEnglish1996
Publisher, publication year, extent ...
- 1996
Numbers
- LIBRIS-ID:oai:research.chalmers.se:5156233b-45ee-4ec0-a257-70fc8cc9214e
- https://research.chalmers.se/publication/17787URI
Supplementary language notes
- Language:English
- Summary in:English
Part of subdatabase
- SwePubSwePub
Classification
Notes
- The use of SPFM (H2SO4-H2O2-HF) at low HF concentrations (10-1000 ppm) has been investigated as a pre-cleaning procedure for silicon direct bonding. This cleaning procedure can be tuned to simultaneously give hydrophilic surface properties, ensuring good bondability, and excellent electric properties, crucial for the application of direct bonding in device applications
Subject headings and genre
- TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
- ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
- integrated circuit reliability
- integrated circuit measurement
- surface contamination
- integrated circuit testing
- optimisation
- silicon
- wafer bonding
- elemental semiconductors
- surface cleaning
- integrated circuit yield
Added entries (persons, corporate bodies, meetings, titles ...)
- Bengtsson, Stefan,1961Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)stefanb (author)
- Chalmers tekniska högskola (creator_code:org_t)
Related titles
- In:Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces. UCPSS '96, s. 123-
Internet link
To the university's database
- 1 of 1
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Ljungberg, Karin
- Bengtsson, Stefa ...
- About the subject
-
- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
- and Electrical Engin ...
- and Other Electrical ...
- Articles in the publication
- Proceedings of t ...
- By the university
- Chalmers University of Technology
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
