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Formation of silico...
Formation of silicon structures by plasma-activated wafer bonding
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- Amirfeiz, Petra, 1973 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Bengtsson, Stefan, 1961 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Bergh, Mats, 1968 (author)
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- Zanghellini, Ezio, 1962 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Börjesson, Lars, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- The Electrochemical Society, 2000
- 2000
- English.
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In: Journal Of The Electrochemical Society. - : The Electrochemical Society. - 0013-4651. ; 147:7, s. 2693-2698
- Related links:
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https://research.cha...
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https://doi.org/10.1...
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Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
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